Clark School Home UMD

ISR News Story

Soon Cho awarded Outstanding Paper Award

ISR Ph.D. student Soon Cho was awarded the Outstanding Paper Award in the student paper competition at Sematech's Advanced Equipment Control/Advanced Process Control Symposium in Colorado Springs. Soon Cho is advised by Professor Gary Rubloff (MNE/ISR) and is a member of his research group. His report, "Real-Time, In-Situ Metrology to Drive Real-Time Advanced Process Control," described his work with others in Dr. Rubloff's group on using in-situ chemical sensors to achieve process metrology and associated real-time process control. Soon has applied these methods to Si ULSI technology and more recently to GaN MOCVD processes in a joint project at Northrop Grumman. The AEC/APC symposium is the prime conference for R&D achievements in advanced process control.

October 14, 2003

Prev   Next



Current Headlines

Maryland UAS Experts Join Humanitarian Effort to Rebuild a Devastated Dominica

Improving speech intelligibility testing with new EEG methods

Work by Khaligh, Ghodssi nominated for UM 'Invention of the Year' awards

Derek Paley interviewed for WYPR's 'On the Record'

The Clark School Celebrates Women's History Month

Maryland Robotics Center adds four faculty affiliates

Alumnus Thomas Winkler receives EU Fellowship

Ulukus Named IEEE ITSOC Distinguished Lecturer

Khaligh, McCluskey receive Boeing funding for more electric aircraft

Fischell Institute Now Accepting Fellowship Applications

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar