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Ghodssi, Reza

Reza Ghodssi
Director, Institute for Systems Research
Herbert Rabin Distinguished Chair in Engineering
2173 A.V. Williams Building
Phone: 
301.405.8158
Fax: 
301.314.9920

Research Interests 

Design and development of microfabrication technologies and their applications to micro/nano devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting.

Background 

Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR) and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.

Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. At Wisconsin, his Ph.D. thesis was focused on development of a high aspect ratio microfabrication process for an electrostatic driven MEMS device using x-ray lithography and LIGA technology. At MIT, he developed the building block MEMS fabrication technologies for a microturbine generator device, and also served as an Assistant Director on that project. At Maryland, his research group has pioneered the development of next generation PowerMEMS devices supported on micro-ball bearing, MEMS-based gray-scale technologies and the use of novel III-V optical MEMS devices and systems for chemical and biological detection.

Dr. Ghodssi's research has been funded by Army Research Lab (ARL), Department of Energy (DoE) National Science Foundation (NSF), Laboratory for Physical Sciences (LPS), NASA Goddard Space Flight Center (GSFC), National Institute of Standards and Technology (NIST) and R.W. Deutsch Foundation. He has served as a program co-chairman for the 2001 International Semiconductor Device Research Symposium (ISDRS) and as a chairman of the "MEMS and NEMS Technical Group" at the American Vacuum Society (AVS) from 2002 to 2004. Dr. Ghodssi was chair of the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009) and served as the Americas Technical Program Committee chair of IEEE SENSORS 2010, 2011 and 2012. He has chaired the committee for the Denice Denton Emerging Leader Award sponsored by Microsoft and the Anita Borg Institute for Women and Technology (ABI) since 2007.

Dr. Ghodssi has more than 95 scholarly publications, is the co-editor of the MEMS Materials and Processes Handbook published in 2011, and is an associate editor for the Journal of Microelectromechanical Systems (JMEMS) and Biomedical Microdevices (BMMD). Dr. Ghodssi has received the 2001 UMD George Corcoran Award, the 2002 National Science Foundation CAREER Award, and the 2003 UMD Outstanding Systems Engineering Faculty Award. He was among 100 of the nation's outstanding engineers invited to attend the National Academy of Engineering (NAE) U.S. Frontiers of Engineering Symposium in 2007 and the National Academy of Engineering (NAE) EU-U.S. Frontiers of Engineering Symposium in 2010. Dr. Ghodssi is the co-founder of MEMS Alliance in the greater Washington area and a member of the IEEE, AVS, MRS, ASEE and AAAS societies.

Honors and Awards 

Young faculty awards
NSF CAREER Award, 2002

University of Maryland awards
ISR Oustanding Systems Engineering Faculty Award, 2002


Related News 

Department of Energy renews NEES EFRC for four years
The center develops highly ordered nanostructures that offer a unique way of looking at the science of energy storage. June 20, 2014

ECE Graduate Student Sowmya Subramanian Wins 2014-15 All-S.T.A.R. Fellowship
Subramanian, working under the direction of ECE/ISR Professor Reza Ghodssi, was selected to receive this competitive Graduate School award. May 13, 2014

Students win ECE Dissertation Fellowships
This year all five Ph.D. students are related to ISR. May 5, 2014

Reza Ghodssi named UMD Distinguished Scholar-Teacher
Ghodssi is the eighth ISR faculty member to be so honored by the university. March 13, 2014

Chu, Subramanian win MAMNA best grad student poster awards
ECE students are affiliated with the MEMS Sensors and Actuators Laboratory. March 12, 2014

Six ECE Graduate Students Selected as Future Faculty Fellows
Students striving toward a career in academia take part in a selective fellowship to prepare for the future. January 30, 2014

Six graduate students participating in UMD-Trento research exchange
The program is part of a broad partnership between Maryland and Trento, Italy. January 20, 2014

Young Wook Kim receives best poster presentation award
The ECE Ph.D. candidate won the award at the Bioscience and Engineering Symposium of the NIH Korean Scientists Association. December 10, 2013

Ghodssi Invited to Speak at IEEE Sensors 2013
Ghodssi delivers lecture on Microsystems for Sensing and Characterization of Bacterial Biofilms November 8, 2013

Rubloff, Ghodssi featured in JVST-A special issue
The Journal of Vacuum Science & Technology A is celebrating the 60th anniversary of the American Vacuum Society. October 30, 2013

Micro-turbine research on cover of Journal of Micromechanics and Microengineering
Ghodssi, Hanrahan and colleagues document the efficacy of using integrated retainer rings in tiny MEMS turbines. June 5, 2013

Micro-turbo-generator research featured in Journal of Microelectromechanical Systems
Researchers from MSAL produce the first demonstration of an integrated permanent-magnet micro-turbo-generator supported on micro-ball bearings. May 28, 2013

Young Wook Kim wins KSEA-KUSCO Graduate Scholarship
Ph.D. student is advised by ISR Director Reza Ghodssi. May 10, 2013

Ekaterina Pomerantseva to join Drexel University faculty
Postdoctoral researcher has worked with ISR Director Reza Ghodssi since 2010. May 10, 2013

ECE Names 2012-2013 Distinguished Dissertation Fellows
Anand, Fan, Guan, and Xie recognized for outstanding research. April 4, 2013

Work by Mosteller, Austin, Ghodssi, Yang featured in INCOSE Insight
Article highlights platforms for engineering experimental biomedical systems. January 11, 2013

Rubloff Co-Authors Major DoE Report on Emerging Energy Technologies
Publication focuses on opportunities in mesoscale science. December 5, 2012

New Microfluidic Device Could Speed Drug Evaluation
Meyer wins Bioscience Day Poster division for work on device capable of separating, testing distinct areas of same biofilm. December 3, 2012

Reza Ghodssi invited speaker at MNE 2012 in Toulouse, France
ISR director spoke on “Biofabrication: An Integrative Processing Tool for Micro/Nano/Bio Systems.” September 28, 2012

Ph.D. candidate Brendan Hanrahan wins silver medal in ARL competition
Student presented his dissertation work on friction, wear, and lubrication of micro-scale ball bearing systems. August 16, 2012

Loh, UMD delegation visit NAS Patuxent River
Congressman Steny Hoyer hosts tour to discuss growing opportunities for partnering on education and research efforts. August 13, 2012

MERIT-BIEN and TREND Fair Showcases Undergraduate Research
More than 20 undergraduate students participate in research projects sponsored by ECE and IREAP. August 7, 2012

Mosteller wins Best Student Paper Award at INCOSE International Symposium
Award presented for "Platforms for Engineering Experimental Biomedical Systems." July 9, 2012

Mosteller wins Dean's Master's Student Research Award
MEMS microfluidics platform could be used for high-throughput drug screening for biofilm infections. May 15, 2012

Student team wins best paper award at Mid-Atlantic Micro/Nano Alliance Symposium
The students are part of the MEMS Sensors and Actuators Laboratory. April 2, 2012

ISR organizes NSF Workshop on Micro, Nano, Biosystems
Event is held March 30-31 in Arlington, Va. March 27, 2012

ISR hosts Iraqi higher education delegation
Delegates meet with President Loh, Provost Wylie and other officials. February 20, 2012

Collaborative international projects funded in solar power, cell-based systems, and ultra-low power systems
Research is part of agreement between Autonomous Province of Trento, Italy, and University of Maryland. February 16, 2012

Ghodssi invited speaker at international nano and biotechnology winter school
ISR director spoke on the use of biomaterials in microfabricated sensors. January 26, 2012

Ghodssi gives invited talk at Bio-Inspired Engineering International Symposium
ISR director spoke on biofabrication using the Tobacco mosaic virus. January 19, 2012

Preventing Costly, Life-Threatening Catheter Infections
Deutsch Foundation-sponsored Clark School research offers multi-pronged attack on major medical problem. January 18, 2012

Markus Gnerlich joins ISR as postdoc
He will be developing a high-power supercapacitor. November 16, 2011

Bassi, Loh further international research agreement
University of Trento Rector and UMD President sign MOU exchanging research and education. November 7, 2011

New alumnus Mustafa Beyaz accepts faculty position in Turkey
Beyaz will become an assistant professor at Antalya International University. October 12, 2011

Clark School researchers figure prominently in atomic layer deposition story
Chemical & Engineering News highlights expansion of the coating technology. August 3, 2011

Ghodssi invited speaker at Transducers 11
ISR director spoke on microball bearing technology for MEMS devices and integrated microsystems. June 6, 2011

International partnership agreement being finalized
International relationship will include research and education components. May 27, 2011

Gerasopoulos Wins Dean's Doctoral Research Award
Grad student takes 1st place and $1500 prize. May 9, 2011

Dean's Doctoral Research Awards Announced
Research on microbatteries, graphene and flapping-wing flight recognized. May 5, 2011

Ghodssi delegate to World Micromachine Summit
ISR director meets His Highness Sheikh Saud Bin Saqr Al Qasimi. May 2, 2011

Gerasopoulos Wins MSE Graduate Research Award
Student recognized for work on nanoscale, virus-templated batteries. April 11, 2011

New MEMS handbook is comprehensive, practical resource for academics, engineers, students
Reza Ghodssi is co-editor of MEMS Materials and Processes Handbook. April 4, 2011

The Diamondback features story on Tobacco Mosaic Virus battery research
Research promises higher-capacity, longer-lasting batteries. January 31, 2011

Baron Featured in IEEE Institute for Chapter, Society Work
First-year graduate student Sergio Baron, a Fulbright Scholar, was highlighted in an IEEE Institute article. January 7, 2011

Ghodssi is guest editor for special issue of Journal of Micromechanics and Microengineering (JMM)
Special proceedings issue features papers from PowerMEMS 2009. December 15, 2010

ISR's busy November: NSF site visit, 25th anniversary dinner, SAC meeting
The Institute for Systems Research held three major events from Nov. 17–19. December 14, 2010

Bad Virus Put to Good Use
In breakthrough batteries, virally structured nano-electrodes boost energy capacity 10-fold. December 6, 2010

Peter Dykstra wins bioengineering poster award
Work on electrochemical DNA sensor honored at Bioscience Day 2010. November 10, 2010

Siwak Honored at ARCS Scholars Ceremony
Ph.D. student presented with scholar award at Achievement Rewards for College Scientists (ARCS) ceremony. November 9, 2010

Ph.D. student Konstantinos Gerasopoulos wins best poster award
Award was presented at 2010 Mid-Atlantic Micro/Nano Alliance Symposium. October 20, 2010

University of Maryland, U.S. Army RDECOM sign CRADA Agreement
Agreement expands research, development and engineering efforts between the two entities. September 28, 2010

2010 Maryland Robotics Day draws large crowd
Government officials, industry representatives, prospective students attend Maryland Robotics Day. September 11, 2010

New Battery Research Highlighted by Discovery News, Nanowerk
Viruses used as structural template for lithium ion battery components. September 7, 2010

MERIT-BIEN and TREND Fair Showcases Undergrads' Summer Research
Students present their summer research accomplishments to judges at annual fair. August 6, 2010

Clark School honors Rajkowski, Beyaz, Banerjee for student research
Students score in Dean's Student Research Award Competition. May 6, 2010

Reza Ghodssi to participate in EU-US Frontiers of Engineering Symposium
ISR director is one of only 60 engineers invited from the US and EU. April 12, 2010

Three ISR students are named ECE Distinguished Dissertation Fellows
Beyaz, Mitra and Varna honored for research excellence. March 23, 2010

ISR organizing interdisciplinary student group
Group will give graduate students opportunity for camaraderie and learning. March 11, 2010

Graduate Student Delivers Micro/Nano Seminar at MIT
Konstantinos Gerasopoulos discussed new virus-based nanomanufacturing technology. March 4, 2010

Reza Ghodssi guest edits special issue of IEEE Transactions on Industrial Electronics
'Special Proceeding' issue focuses on energy harvesting. March 3, 2010

Micro-ball bearing research featured in Micro Manufacturing magazine
Work of Ghodssi, MSAL cited in micro engine article. January 14, 2010

Clark School hosts PowerMEMS 2009 attendees for luncheon, lab tours
Six laboratories showcased in special tours. December 7, 2009

Mariano Anderle visits ISR from Province of Trento, Italy
Longtime friend of ISR is exploring new collaborations and partnerships. November 18, 2009

Nathan Siwak, Natalie Salaets given ARCS Fellowships
Students honored at U.S. Supreme Court reception. October 13, 2009

Reza Ghodssi Appointed Director of the Institute for Systems Research
ISR excels in cross-disciplinary systems engineering research and education. September 16, 2009

Ghodssi Receives NSF Grant for Novel Nanofabrication for Energy Applications
Research uses tobacco mosaic virus in fabrication of energy storage devices. July 27, 2009

Ghodssi Receives NSF Grant for Microball Bearings Research
Research focuses on low-friction, long-life microball bearings for PowerMEMS devices. June 17, 2009

Ghodssi, Wang, Culver Awarded Nanobiotechnology Grant
State of Maryland funds innovative fuel cell research. June 5, 2009

Fourteen ISR-affiliated students receive Ph.D.s
Congratulations to our ISR-affiliated doctoral graduates! May 22, 2009

Ornithopter, optical microsensor win ISR seed grants
Research by Bergbreiter, Gupta, Ghodssi and Culver to be given one-year funding. May 20, 2009

Adomaitis, Ghodssi, Sandborn promoted
University of Maryland President C.D. Mote promotes three ISR faculty to full professor. April 27, 2009

Ghodssi chairs PowerMEMS 2009 Conference
Conference to showcase micro and nanotechnology for power generation and energy conversion. April 7, 2009

Ghodssi Featured in Mechanical Engineering Magazine Cover Story
MEMS microscale ball bearing research highlighted in feature article. April 2, 2009

ECE Grad Student Siwak Awarded ARCS Fellowship
Nathan Siwak was awarded a 2009 Achievement Rewards for College Scientists (ARCS) Fellowship. March 27, 2009

NanoCenter Improves Energy Storage Options
Maryland NanoCenter researchers create new device to store electrical energy. March 16, 2009

Paper Named 2008 'Highlight' by Journal of Micromechanics and Microengineering
Reza Ghodssi co-authors paper describing major microbattery breakthrough. March 6, 2009

Six ISR students chosen for Clark School's Future Faculty Program
The program aims to increase the number of Ph.D. graduates who obtain academic positions in prestigious engineering schools. February 18, 2009

Six ISR students selected for Future Faculty Program
Clark School program helps students prepare for academic positions. February 15, 2009

Stephan Koev wins university-wide graduate research contest
His microcantilever research is featured in the February 2009 Research@Maryland. February 9, 2009

Stephan Koev wins MEMS Alliance best poster award
Poster highlights research on optical microcantilever sensors for liquid samples. November 26, 2008

Ghodssi team's micro ball bearing work makes miniature machines possible
Researchers are the first to manufacture and integrate practical microscale pumps, motors and turbines. September 22, 2008

Ghodssi Named Associate Editor of JMEMS
Journal of Microelectromechanical Systems is top MEMS publication. July 17, 2008

Ghodssi, Rubloff receive bioMEMS patent
U.S. patent 7,375,404 is awarded for fabrication and integration of polymeric bioMEMS. June 3, 2008

Vorontsov, Koev, Wei and McKinney win at ISR awards ceremony
Quartet honored for outstanding contributions in 2007–2008. May 28, 2008

Ghodssi Named Herbert Rabin Distinguished Professor
Dr. Reza Ghodssi is recognized for sustained and influential scientific and scholarly work. May 5, 2008

ECE Faculty Honored at Inaugural Scholarship & Research Celebration
Twenty-seven ECE faculty members honored, representing 1/8 of researchers recognized university-wide. May 2, 2008

Reza Ghodssi named associate editor of Journal of Biomedical Microdevices
Journal focuses on biomedical applications of micro- and nanotechnology. April 17, 2008

New Advance in Biochip Research
Microfactories for drug research are one step closer to reality. April 7, 2008

Chuang Earns Intel Achievement Award
Ph.D. Alumnus Wen-Hsien Chuang receives highest honor as employee at Intel. March 11, 2008

Ghodssi To Give Plenary at International MEMS Conference
Prof. Ghodssi will speak on "Integrative MEMS/NEMS Technology for Micro and Nano Systems." November 23, 2007

Ghodssi, Rubloff part of $2 million NSF grant
Cellular and biomolecular engineering research to focus on biofunctionalized devices. August 28, 2007

A Microcantilever Sensor with Integrated Optical Readout for Liquid Samples (ISR IP)
This IP is available to license. June 24, 2007

A Device and Method for Measuring Microcantilever Beam Displacement by Interference Fringe Shifting (ISR IP)
This IP is available to license. June 23, 2007

Controlled Electromechanical Deposition of Polysaccaride Film and Hydrogel and Materials Formed Therefrom (ISR IP)
This IP is available to license. June 22, 2007

Assembly of Chitosan onto an Electrode Surface (ISR IP)
This IP is available to license. June 22, 2007

Micro-Knife-Edge Techniques for Sealing of Microfluidic Systems (ISR IP)
This IP is available to license. June 22, 2007

Programmable Selective Deposition of Biofunctional Polymer Surfaces (ISR IP)
This IP is available to license. June 21, 2007

Thermo-Bio-Lithography (ISR IP)
This IP is available to license. June 21, 2007

Fabrication and Integration of Polymeric BioMEMS (ISR IP)
This IP is available to license. June 21, 2007

Ph.D. Student Receives AVS Graduate Research Award
Stephan Koev, an advisee of Prof. Ghodssi, wins 2007 American Vacuum Society's Graduate Research Award. June 18, 2007

Ghodssi Invited to Participate in NAE Frontiers Symposium
Prof. Ghodssi among 100 of the nation's outstanding young engineers invited to the event. May 24, 2007

Nima Ghalichechian receives ISR Outstanding Graduate Student Award
Ph.D. student's research focuses on micro ball-bearing technology for miniature battery applications. May 10, 2007

MEMS Researchers Win IEEE LEOS Best Paper Competition
Graduate students from Prof. Reza Ghodssi's MEMS laboratory shared first prize in DC/VA/MD competition. April 30, 2007

MEMS research of Morgan and Ghodssi featured in NASA Tech Briefs
Gray-scale technology used in aligning optical fibers with actuated MEMS wedges. March 16, 2007

New legs for chitosan nanosensor story
FOX 45 TV news highlights research in 'cover story' November 9, 2006

$1 Million For Nano-Bio Initiative
Deutsch Foudation will fund Clark School bioengineering research on the nanoscale. August 31, 2006

Crab Nano-Sensor Detects Dangerous Substances
A material found in crab shells is part of a new sensor system. July 26, 2006

News story about Ghodssi's III-V MEMS work rockets around globe
MEMS nanoscale sensor system uses Chitosan, crab shell substance July 22, 2006

Ph.D. student selected for AVS Graduate Research Award
Nima Ghalichechian is the second MEMS Sensors and Actuators Lab to win the highly competitive award June 2, 2006

Ghodssi Group Paper Featured in Journal of Micromechanics & Microengineering
Paper co-authored by Ghodssi group selected as feature article in JMM. March 29, 2006

Magazine highlights Ghodssi's III-V optical MEMS work
Associate Professor Reza Ghodssi's (ECE/ISR) LPS and NSF-sponsored III-V Optical MEMS activities are featured in the March 2006 issue of Compound Semiconductor magazine. March 15, 2006

ISR alum Xiaobo Tan wins NSF CAREER Award
ISR alum and current Michigan State University ECE Assistant Professor Xiaobo Tan has won a National Science Foundation Faculty Early Career Development (CAREER) Award for his research, "Dexterous Biomimetic Micromanipulation Using Artificial Muscles: Modeling, Sensing and Control." February 24, 2006

NanoCenter featured on PBS's Nightly Business Report
Segment is titled "The Science and Business of Nanotechnology" November 3, 2005

Ghodssi awarded ARL grant for microball bearing technology
Research will enhance the efficiency and reliability of liquid- and gas-fueled power sources July 24, 2005

Washington Post columnist lauds university's nanotechnology efforts
Reza Ghodssi's work is featured as example of Maryland's leadership July 23, 2005

Pruessner and Amarnath selected for Best Student Paper Award
Leading international conference on Indium Phosphide (InP) materials and devices honors graduate students May 8, 2005

University of Maryland ranked No. 1 in nano research and education
Trade publication Small Times cites many factors in ratings May 1, 2005

American Vacuum Society honors student paper
Work merits 2004 MEMS and NEMS (MN) Technical Group Best Graduate Student Paper Award April 16, 2005

Ghodssi selected for ROSS-2004 award
Funding focuses on phase Fresnel lens development April 9, 2005

Two grad students awarded ARCS Scholarships
Brian Morgan and Daniel Fitzgerald are both talented researchers April 6, 2005

Ghodssi team wins best poster award
MEMS Alliance group honors "Indium Phosphide Based Optical Waveguide MEMS for Communications and Sensing" project April 5, 2005

ISR faculty win two Invention of the Year awards
Faculty recognized in information science and physical science categories April 2, 2005

Ghodssi, Horiuchi earn tenure
Both are named associate professors by University of Maryland President C.D. Mote, Jr. March 17, 2005

Michael Powers wins at Maryland Bioscience Research Review Day
Grad student's poster on biophotonic MEMS cell sensors takes prize January 18, 2005

Ghodssi speaks at National Cancer Institute
ISR faculty member is among nationally-known nanotechnology experts speaking at symposium. October 4, 2004

Rubloff leads new M-CINSE nanotech center
Sept 2004—Former ISR director to help the university contribute to cutting-edge nanoscience September 2, 2004

Toshiba's Iguchi joins ISR Visiting Scientists Program
August 2004—Engineer will be working on microelectronics process technology. August 6, 2004

ISR's Xiaobo Tan joins Michigan State University
July 2004—Former ISR research associate to become Assistant Professor in ECE department. July 2, 2004

Gupta, Ghodssi, Shapiro part of $3 million micro air vehicles MURI
April 2004—ISR faculty will be working on "Micro Hovering Air Vehicles: Revolutionary Concepts and Navigation Advancements" April 11, 2004

Ghodssi receives NSF grant for InP-based MEMS-tunable optical filters and switches
April 2004—ISR faculty member will develop and test wavelength-selective widely tunable (1250-1650 nm) resonant microcavity filters and switches. April 10, 2004

Morgan, recipient of ARCS Scholarship
Graduate student's research focuses on novel three-dimensional silicon MEMS microfabricatin technology February 4, 2004

New Toshiba visiting scientist arrives at ISR
Mr. Taizo Tomioka will conduct research on microelectronics process technology February 1, 2004

ISR faculty showcase research to Honeywell Labs delegation
Research of Baras, Abshire, Ghodssi, Krishnaprasad and Justh featured. December 6, 2003

Graduate student Marcel Pruessner receives ARCS Scholarship
October 2003—Research focuses on optical switching and III-V MEMS. October 15, 2003

Temporary Clark School clean room opens
Room meets urgent need for enhanced fabrication capabilities. October 12, 2003

Marcel Pruessner receives ARCS scholarship
Pruessner joined two other Clark School of Engineering students. October 3, 2003

Ghodssi wins NSF grant for microball bearing technology
Research will increase reliability and efficiency of MEMS September 1, 2002

Ghodssi, Rubloff, Smela awarded DURIP for chemical mechanical planarizer
Tool used in semiconductor fabrication, microelectronics, optoelectronics and MEMS April 5, 2002