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Adomaitis, Raymond A.

Raymond A. Adomaitis
Professor
2255 A.V. Williams Bldg.
Phone: 
301.405.2969
Fax: 
301.314.9920

Research Interests 

Our research focuses on simulation-based design, optimization, and experimental evaluation of advanced materials manufacturing processes. We are particularly interested in developing new reactor designs for thin-film deposition of semiconductor materials for electronic and solar energy applications.

One of our major areas of activity is in the development of next-generation thin film chemical vapor deposition (CVD) and atomic-layer deposition (ALD) systems. We have developed and tested new reactor design concepts which enable explicit manipulation of the gas-phase composition across the substrate surface during processing, making combinatorial CVD studies and other novel operating modes (including deposition on extremely large substrates) possible. Current work relevant to microelectronic and solar cell manufacturing includes Si CVD, epitaxial growth of III-V compounds, and ALD of metal oxide films.

Important numerical tools developed in our research group in close collaboration with industrial partners include a full-wafer response-surface modeling methodology applicable to the optimization and control of film properties across the entire substrate, and a model-free uniformity control approach based on identifying the Nearest Uniformity Producing Profile (NUPP) for reactor systems with rotating substrates.

Video 

Background 

Ray Adomaitis received his B.S. and Ph.D. in Chemical Engineering from the Illinois Institute of Technology. After two years working on computational nonlinear dynamics as a postdoctoral researcher at Princeton University, he joined the Institute for Systems Research (ISR) at the University of Maryland as a postdoctoral fellow. Currently, he is a Professor and Associate Chair for Undergraduate Studies in the Chemical and Biomolecular Engineering Department with a joint appointment at the ISR at the University of Maryland. He also is affiliated with the Maryland NanoCenter and the University of Maryland Energy Research Center (UMERC).

Ray's research interests focus on simulation and design of thin-film manufacturing processes with applications in microelectronics, alternative energy, nanomanufacturing, and spacecraft systems. Most of his current efforts are directed to developing physically based models of atomic layer deposition surface reaction kinetics to provide simulation tools for the scale-up and optimizion of these manufacturing processes. His teaching activities include undergraduate and graduate-level classes in solar energy, chemical engineering computations, and capstone process design. Among other awards and activities, he is fellow of the American institute of Chemical Engineers.

2009-present

Professor, Chemical Engineering and ISR, University of Maryland
2001-2009 Associate Professor, Chemical Engineering and ISR, University of Maryland
2004-2006 Acting Chair, Chemical & Biolomolecular Engineering, University of Maryland
2001-2004 Associate Chair for Graduate Studies, Chemical & Biomolecular Engineering, University of Maryland
1995-2001

Assistant Professor, Chemical Engineering and ISR, University of Maryland

1990-1995 Postdoctoral Fellow/Research Scientist, ISR, University of Maryland

 

Honors and Awards 

Fellows
American Institute of Chemical Engineers, 2011

Young faculty awards
NSF Engineering Education Scholar, 1995

University of Maryland awards
Teacher of the Year, 1996
Professor of the Year, 1997
ISR Outstanding Systems Engineering Faculty Award, 2005


Related News 

Hossein Salami wins UMD graduate research prize
His work focuses of chemical reaction network analysis for ALD and CVD processes. April 11, 2017

Congratulations ISR graduates!
These new alumni graduated from the University of Maryland in December 2016. December 20, 2016

ENES 489P holds end-of-the-semester design conference
Professionals from Booz Allen Hamilton, Metron Aviation and Engility judged student projects; Textron Systems sponsored prizes. December 9, 2016

Adomaitis, Baras, MacCarthy speakers at UMD climate forum
Trio spoke at "Systems Engineering for the Integration of Renewable Energy Resources." May 5, 2016

UMD Team Selected to Participate in International Solar Decathlon
Teams will be competing for $2 million in prize money February 9, 2016

ENES 489P holds systems engineering design conference
Thirty-eight students participated in the competition. December 4, 2015

Adomaitis Wins IIT Distinguished Alumnus Award
Professor honored for contributions to the field of chemical engineering. October 30, 2014

Travis Presented with CAST Award for Atomic Layer Deposition Simulations
Grad student recognized at national meeting of the AIChE. January 23, 2014

Adomaitis selected to EuroCVD Advisory Board
He will be the U.S. representative to the international thin-film conference series. October 17, 2013

Adomaitis, Burka, and Choi Participate in Major International Conferences
Professors helped coordinate activities and presented their latest research. September 10, 2013

ALD work of Adomaitis, Dwivedi featured in NASA Goddard newsletter
Research could benefit X-ray astronomy, instrument cooling in space, and spacecraft shielding. August 20, 2012

Past AIChE President Joins ChBE, ISR as Visiting Professor
Maria Burka working with Adomaitis Group on atomic layer deposition project. May 1, 2012

Ray Adomaitis elected Fellow of AIChE
Research focuses on simulation-based design, optimization, and experimental evaluation of advanced materials manufacturing processes. October 24, 2011

Adomaitis, Ghodssi, Sandborn promoted
University of Maryland President C.D. Mote promotes three ISR faculty to full professor. April 27, 2009

NanoCenter Improves Energy Storage Options
Maryland NanoCenter researchers create new device to store electrical energy. March 16, 2009

Adomaitis on EuroCVD-17 international organizing committee
Conference focuses on chemical vapor and atomic layer deposition systems. April 29, 2008

Palathra, de Pilar Leon to gain international research experience
Grad students of Ray Adomaitis to travel to Singapore, Argentina. April 29, 2008

An Atomic Layer Deposition Approach to Controlling the Shape Profiles of Nanostructures Deposited Inside Nanoporous Materials (ISR IP)
This IP is available to license. June 24, 2007

A Computational Algorithm for Solar Reflector Optimization with Novel Applications in Concentrating Photovoltaic Solar Collector Design (ISR IP)
This IP is available to license. June 24, 2007

A Method for Determining the Nearest Uniformity Producing Profile (NUPP) for the Control of Thin-Film Processing Systems with Wafer Rotation (ISR IP)
This IP is available to license. June 22, 2007

Segmented Reactor Showerhead Design with Exhaust Gas Recirculation and Spatially-Resolved Sensing Capability for Chemical Vapor Deposition, Plasma-Enhanced CVD, and Plasma Etch Processes (ISR IP)
This IP is available to license. June 18, 2007

ISR awards honor faculty, grad student and staff member
Abshire, Parikh, Luceno receive awards May 15, 2006

2005 ISR Awards honor Adomaitis, Nesgarani, Briggs
Outstanding faculty, grad student and staff member selected May 2, 2005

University of Maryland ranked No. 1 in nano research and education
Trade publication Small Times cites many factors in ratings May 1, 2005

Adomaitis, Rubloff, Kidder own U.S. Patent 6,821,910
December 2004—Trio invented 'Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation.' December 7, 2004

Rubloff leads new M-CINSE nanotech center
Sept 2004—Former ISR director to help the university contribute to cutting-edge nanoscience September 2, 2004

Rubloff, Takeuchi are co-PIs for NSF International Materials Institute
Five-year, $3.5 million grant focuses on combinatorial sciences and materials informatics. June 15, 2004

Adomaitis mentors Gemstone 'ChemSense' student group
April 2004—Student group researches the true value of gas sensor networks in protecting public spaces. April 4, 2004

Rubloff, Takeuchi are PIs for new NSF international materials institute
CoSMIC to develop tools for high-speed discovery and evolution of new materials and processes March 4, 2003

Adomaitis and Rubloff win NSF ITR grant
Research to develop a new paradigm for semiconductor manufacturing equipment. August 3, 2002

Admaitis, Herrmann, Schmidt and Walsh receive tenure
The four ISR faculty members were also promoted to associate professor status May 9, 2001