Clark School Home UMD

ISR News Story

Ghodssi, DeVoe awarded MRI for MEMS aligner/bonder

ISR researchers have won a $239,405 NSF Major Research Instrumentation Award (MRI) to purchase an aligner/bonder for MEMS and Microsystems research. This state-of-the-art MEMS microfabrication equipment patterns features in photosensitive polymeric materials, aligns multi-stack silicon (and other materials like glass) wafers with micron scale accuracy and bonds these wafers permanently to form structures and devices of different shapes and forms.

Assistant Professor Reza Ghodssi (ECE/ISR) is the Principal Investigator; co-PIs are: Assistant Professor Don DeVoe (ME/ISR), Assistant Professor Elisabeth Smela (ME) and Professor John Melngailis (ECE/IREAP).

The award, "MRI: Acquisition of an Aligner and Bonder Instrument for Research," is effective September 1 , 2001 and expires August 31, 2002.

As a condition of this award, the University of Maryland will provide $147,000 cost sharing.

NSF's Major Research Instrumentation Program (MRI) is designed to increase access to scientific and engineering equipment for research and research training in academic institutions. It seeks to improve the quality and expand the scope of research and research training in science and engineering, and to foster the integration of research and education by providing instrumentation for research-intensive learning environments.

The MRI Program assists in the acquisition or development of major research instrumentation by U.S. institutions that is, in general, too costly for support through other NSF programs. The maintenance and technical support associated with these instruments are also supported. Proposals may be for a single instrument, a large system of instruments, or multiple instruments that share a common or specific research focus.

August 12, 2001


Prev   Next

 

 

Current Headlines

Prof. Sang Bok Lee appointed director of Maryland NanoCenter

ECE Inducts Three New Distinguished Alumni

UMD Risk Expert Contributes to National Academies Report on National Drone Policy

Ephremides leads new NSF Age of Information project

Barg is principal investigator for new NSF information recovery award

Northrop Grumman contributes research funding for third consecutive year

Simon, Abshire, Elhilali give invited talks

Best paper award for Bergbreiter, St. Pierre, Gosrich at Hilton Head workshop

Center for Disaster Resilience Affiliate Offers Insight on Ellicott City Future Plans

Study validates face recognition experts, but shows humans perform best with an AI partner

News Resources

Return to Newsroom

Search News

Archived News

Events Resources

Events Calendar