Micro-Optical Sensor Systems for Displacement, Pressure, and Acceleration Measurements (ISR IP)

For more information, contact ISR External Relations Director
Jeff Coriale at coriale@umd.edu or 301.405.6604.

ISR intellectual property available to license

Inventors
Miao Yu, Balakumar Balachandran

U.S. Patent: 7,428,054

Description
A micro-optical fiber tip based sensor system for pressure, acceleration, and pressure gradient measurements in a wide bandwidth, the design of which allows for multiplexity of the input side of the system is based on micro-electromechanical fabrication techniques. The optical portion of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer combination that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source. A phase modulation and demodulation scheme takes advantage of the Integrated Optical Circuit phase modulator and multi-step phase-stepping algorithm for providing high frequency and real time phase signal demodulation. The system includes fiber tip based Fabry-Perot sensors each of which has a diaphragm that is used as a transducer.

For more information
If you would like to license this intellectual property, have questions, would like to contact the inventors, or need more information, contact ISR External Relations Director Jeff Coriale at coriale@umd.edu or 301.405.6604.

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ISR-IP-Yu ISR-IP-fiber-optic-sensor ISR-IP-sensors ISR-IP-nano

Published June 21, 2007