John S. Baras


Robust Nonlinear Control of a Rapid Thermal Processor

J.S. Baras and N.S. Patel,

13th International Conference on Chemical Vapor Deposition (CVD-XIII), Los Angeles, CA, May 5-10, 1996

Full-text article [ PDF]


This paper presents application of robust multvariable nonlinear control to the temperature control problem for rapid thermal processing systems. The controller designed achieves good tracking and temperature uniformity for a wide range of processing conditions.

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