Robust Nonlinear Control of a Rapid Thermal Processor
J.S. Baras and N.S. Patel,
13th International Conference on Chemical Vapor Deposition (CVD-XIII), Los Angeles, CA, May 5-10, 1996
This paper presents application of robust multvariable nonlinear control to the temperature control problem for rapid thermal processing systems. The controller designed achieves good tracking and temperature uniformity for a wide range of processing conditions.