ISR research accomplishments

Model Reduction for RF Plasma Discharge Reactor Systems

Research team

Raymond A. Adomaitis (ChE/ISR); Yi-hung Lin (currently employed at Intel)

Accomplishment

Simulation and model reduction methods were developed to study numerical solutions to a plasma glow discharge model, a basic component of simulators for plasma processing systems used in microelectronic device fabrication.

Impact

First reported study of model reduction methods for RF discharges: POD-Galerkin method was shown to reduce computation times by two orders of magnitude. First reported use of global spectral projection methods for DC and RF discharge models, with demonstrated benefits in understanding the interplay between discharge physics and solution convergence. Glow discharge simulation and model reduction problems motivated the development of the MWRtools library.

For more information

ISR Technical Report | 97-81 |

Y.-h. Lin, and R.A. Adomaitis, Phys. Lett. A, 243 (1998) 142-150.

Y.-h. Lin, and R.A. Adomaitis, “Simulation and Model Reduction of an RF Plasma Glow Discharge,” (2000) submitted for publication.