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Integration of Micro-Optics for Safety and Arming Systems

Research team

D. DeVoe (ME/ISR), S. Chen, M. Beamesderfer (UMd) E. Litcher (Naval Surface Warfare Center)

Accomplishment

Provides an optical configuration coupled with a LIGA or DRIE based micro-actuator to provide a junction between a low power input and a high power output, which allows for “fail-safe” activation and termination of an optical path.

Design test platforms for optical energy transport under prescribed fiber/barrier configurations. Investigate and design monolithic structures for on-chip fiber optic packaging for MOEMS.

Optical Configuration Analysis. Fiber Optic Packaging Structures in Monolithic MOEMS Structures

Arrays of optical fiber channels allow for characterization of required clamping force under thermal cycling and withdrawal forces. Monolithic structures allow for optical fiber packaging without additional wafer processing. Changes in fiber positioning are monitored interferometrically via embedded Fabry-Perot cavities.

Impact

Safety and Arming Systems (S&A) provide a mechanism for preventing unwanted detonation of ordinance. MEMS technology allows miniaturized S&A devices with multiple functionality (energy conversion, environmental sensing, detonation. Monolithic fiber optic packaging structures for MOEMS present a highly advantageous method for secure optical system integration without additional wafer processes.

For more information

M. Beamesderfer, S. Chen, D. DeVoe, E. Litcher, K. Johnson, “An Analysis of MEMS Based Optical Energy Interrupter for MEMS Based Safety and Arming Systems,” SPIE vol. 3880, Micromachining and Microfabrication, 1999.

Maryland MEMS Lab

   
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