Clark School Home UMD
Return to Research Awards

NSF: Time-scale analysis for the synthesis of thin-film deposition reaction kinetics models

Funding Agency 

National Science Foundation

Description 

This project will investigate the mathematical structure of differential-algebraic (DAE) systems of equations describing surface reaction species during ALD and CVED thin film deposition processes. A reaction network factorization procedure will be developed that partitions surface reaction and deposition species dynamic balances into sets of relatively slow (deposition), fast (equilibrium), and instantaneous (conserved) modes. The project will determine conditions under which the factorization works, the importance of fixed points of the equations, and reaction fluxes of chemical species.

Time-scale analysis for the synthesis of thin-film deposition reaction kinetics models is a three-year, $300K grant.