Clark School Home UMD
Return to Research Posters

Processing and Characterization of PMSSQ Based Materials for Nanoporous Low-K Dielectrics

File 

Faculty 

J.J. Park
Z. Lin
P. Lazzeri
L. Vanzetti
M. Bersani
M. Anderle (ITC-irst, Italy)
R.D. Miller (IBM Almaden Research Center)