Reza Ghodssi
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Associate Professor 301/405-8158 TEL |
Research Interests
Design and development of microfabrication technologies and their applications to microsensors, microactuators, and integrative microsystems for biosensing and energy harvesting
Background Information
Reza Ghodssi is an Associate Professor and the Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD). He is also a core faculty member in the Bioengineering Graduate Program and the Maryland NanoCenter at UMD.
Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to microsensors, microactuators, and integrative microsystems for biosensing and energy harvesting. At Wisconsin, his Ph.D. thesis was focused on development of a high aspect ratio microfabrication process for an electrostatic driven MEMS device using x-ray lithography and LIGA technology. At MIT, he developed the building block MEMS fabrication technologies for a microturbine generator device, and also served as an Assistant Director on that project.
At Maryland, his research group has pioneered the development of next generation PowerMEMS devices using micro-ball bearing and MEMS-based gray-scale technologies and the use of novel III-V optical MEMS devices and systems for chemical and biological detection. Dr. Ghodssi's research has been funded by Army Research Lab (ARL), National Science Foundation (NSF), Laboratory for Physical Sciences (LPS) of the National Security Agency (NSA), NASA Goddard Space Flight Center (GSFC), Northrop Grumman and Toshiba.
He has served as a program co-chairman for the 2001 International Semiconductor Device Research Symposium (ISDRS) and as a chairman of the "MEMS and NEMS Technical Group" at the American Vacuum Society (AVS) from 2002 to 2004.
Dr. Ghodssi has over 50 scholarly publications and was recently selected as editor of the "Handbook of MEMS Materials and Processes" to be published in 2008. He has received the 2001 UMD George Corcoran Award, the 2002 National Science Foundation CAREER Award, and the 2003 UMD Outstanding Systems Engineering Faculty Award. Dr. Ghodssi is the co-founder of MEMS Alliance in the greater Washington area and a member of the IEEE, AVS, MRS, ASEE and AAAS societies.
Links
Electrical
and Computer Engineering Department
MEMS
Sensors and Actuators Lab
Maryland NanoCenter
MEMS
Alliance
Bioengineering
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