Raymond Adomaitis

Professor Chemical and Biomolecular Engineering and ISR 2255 A.V. Williams Bldg. University of Maryland, College Park, MD 20742 301/405-2969 TEL 301/314-9920 FAX adomaiti@umd.edu Research group home page News stories about Dr. Adomaitis Intellectual property available to license

Research Interests

My research focuses on developing chemical process simulation methods with applications to semiconductor manufacturing and solar energy. Specifically, we are interested in using object-oriented computing concepts to simplify the development of modular simulations of nonlinear and distributed parameter systems. Our goal is to make as transparent as possible the implementation of the advanced MWR necessary for developing reduced-order models for semiconductor and other chemical process simulation, optimization, control, parameter identification, and sensing applications. Active research projects are listed below.

MOCVD—a 5-year collaboration between the University of Md and Northrop Grumman has focused on simulation-based design and optimization of GaN and SiC CVD reactor systems.

Software—extensive MATLAB based software for implementing eigenfunction expansion, Galerkin, and collocation discretization has been developed; current research focuses on object-oriented implementations of modular Newton procedures.

IT in semiconductor manufacturing—research focuses on information technology issues related to semiconductor processing, specifically developing an XML-based infrastructure for distributed simulation and data archiving.

The programmable reactor—concepts in highly-controllable CVD reactor design have been investigated through simulation and the construction of a number of prototype reactor system. The design is based on a segmented showerhead that allows 2D spatial control of reactant gas composition across the wafer surface. Current research focuses on segmented reactor designs for large-substrate and combinatorial CVD.

ALD—multiscale simulation techniques are under development for Atomic Layer Deposition systems with a goal of understanding the potential of combinatorial ALD.

Solar energy—we are exploring the feasibility of extending our combinatorial thin film processing techniques to solar materials; other solar material processing projects are underway including multiscale modeling of the silicon ingot slicing process.

Background Information

Links

Chemical and Biomolecular Engineering Department
University of Maryland Energy Research Center
AIChE Computing and Systems Technology Division
AIChE National Capital Section
Maryland NanoCenter

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