PPT Slide
Talk Outline
Model Reduction: Motivation
Model Reduction: State-Space Methodology
Proper Orthogonal Decomposition
Balanced Truncation for Linear Systems
Standard and Ad-Hoc Approaches POD and Balanced Truncation
RTP Wafer Heat Transfer Model
POD Application: RTP Wafer Heat Transfer
Model Reduction for RTP Wafer Heat Transfer Validation Tests (Balanced Truncation)
Model Reduction for RTP Wafer Heat Transfer Predictive Capability and Comparison
Balanced Truncation for Nonlinear Systems
Stochastic Methods for Computation Stationary Densities and the Controllability Function
Special Case: Second-Order Mechanical Systems
Example: Forced, Damped Pendulum System
Example: Forced, Damped Double Pendulum System
The Morse-Palais Lemma
Computing the Morse Coordinate Transformation
A Balanced Realization for the Pendulum System Singular Value Functions
A Balanced Realization for the Pendulum System Output (Position) Responses
Toward Balancing the Double Pendulum System Singular Value Functions
Summary and Remarks
ASM Epsilon-1 RTCVD Reactor
Epsilon-1 Wafer Level Overhead View
Epsilon-1 Operating Structure
Thermocouple Offsets: Case Study
Uniformity Prediction
Modeling Framework
Steady-State Transport Phenomena
Deposition Rate Prediction
Silane Flow Rate Sensitivity
Email: newman@isr.umd.edu
Home Page: http://www.isr.umd.edu/~newman
Other information: Andrew J. Newman Ph. D. Thesis Presentation November 19, 1999