|
This is an experiment in archiving data files containing spatially resolved measurements of thin film properties over the entire surface of a substrate (wafer). These data files contain the measurement positions across the substate surface and the corresonding measurement, such as film thickness. The data files also contain information regarding the processing conditions, such as temperature.
The data files are plain ASCII files marked up with XML tags to identify the data. Each data set includes a MATLAB script that allows a user to read the data directly into a MATLAB session, creating a sequence of wafer objects (see the mdpsas library).
Current archives
| 
