| Student | Degree | Thesis/Project |
| Vivek Dwivedi | PhD ChE expected 2009 | Multiscale and Atomistic Simulation of CVD and ALD Processes |
| Negin Shahshahan | PhD ChE expected 2011 | To be determined |
| David Arana-Chavez | PhD ChE expected 2011 | To be determined |
| Deepa Subramanian | MS ChE expected 2009 | Simulation of 2D Phase Transitions (co-advised with Prof. Anisimov) |
| Glenn Guglietta | BS ChE expected 2009 | Metal Oxide Semiconductor CVD for Solar Energy Applications |
| Tim Wanga | BS ChE expected 2009 | Electrochemistry of Photoelectrochemical Water Decomposition |
 | The research group in 2008 including
(front row, left to right) Deepa Subramanian, Negin Shahshahan, Pilar Leon, Jens Weisflog, (back row, l-to-r) Tom Palathra, Vivek Dwivedi, Rama Sreenivasan,
Glenn Guglietta |
| Research group alumni |
| Group alumni - PhD |
| Ramaswamy Sreenivasan | PhD ChE 2007 | Combinatorial Methods Using a Spatially Programmable Chemical Vapor Deposition System |
| Rinku Parikh | PhD ChE 2006 | Simulation of GaN and SiC MOVPE Reactor Systems; Current employer. Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P. |
| Jing Chen | PhD ChE 2006 | Development of an Object-Oriented Framework for Modular Chemical Process Simulation with Semiconductor Manufacturing Applications. Current employer: Tufts University |
| Jae-Ouk Choo | PhD ChE 2004 | Design and Simulation of a Programmable Chemical Vapor Deposition Reactor. Current employer: Samsung |
| Hsiao-Yung Chang | PhD ChE 2000 | Modeling and Simulation of a Tungsten Chemical Vapor Deposition Reactor. Current employer: Novellus Systems, Inc. |
| Yi-hung Lin | PhD ChE 1999 | From Detailed Simulation to Model Reduction: Development of Numerical Tools for a Plasma Processing Application. Current employer: Intel Corporation |
| Artemis Theodoropoulou | PhD ChE 1997 | Temperature Uniformity Control for Rapid Thermal Chemical Vapor Deposition Reactors. Current employer: OSI Software, Inc. (co-advised with Prof. Zafiriou) |
 | The research group in 2003 including (left to right) Erin Evans, Rinku Parikh, Brendan Hoffman, Jing Chen, and Jae Choo |
| Group alumni - MS |
| Maria del Pilar Leon | MS ChE 2008 | Full Wafer Response Surface Modeling |
| Thomas Palathra | MS ChE 2008 | Multiscale Simulation of a Silicon Wafer Slicing Operation Current employer: NSWC |
| Jens Weisflog | MS Systems Engineering 2008 | An XML Application-Based Interface to Developing Modular System Simulations |
| Ashish Sabadra | MS ChE 2001 | Conducting Polymer Gas Sensor System Simulation and Parameter Identification. Current employer: Oracle, Inc. |
| Jiefei Huang | MS ChE 2000 | An Object-Oriented Programming Approach to Implement Global Spectral Methods: Application to Dynamic Simulation of a Chemical Vapor Infiltration Process. Current employer: Fannie Mae |
| Yong Li | MS ChE 2000 | Micro Gas Sensor System Simulation. Current Employer: North Carolina State University (co-advised with Prof. McAvoy) |
| Group alumni - BS |
| Ramsey Zeitoun | BS ChE 2005 | Sulfunation of methane as a new route to methanol production |
| Daniel Markus | BS ChE 2005 | SiC wafer warp simulation |
| Erin Evans | BS ChE 2003 | SiC MOVPE reactor simulator development and validation |
| Brendan Hoffman | BS ChE 2003 | GaN CVD reactor simulator development and validation |
| Erin Wilson | REU 1999 | A simulation study of gas temperature in a CVD reactor |
| Andrew Birkmire | BS ChE 1997 | Process gas compression system modeling |
| Shi Jie (Jack) Chen | BS ChE 1997 | Semiconductor process modeling |
| Dheeraj Joshi | BS ChE 1997 | Kinetics of polysilicon deposition |
| Peter Loezos | BS ChE 1997 | Carbon-carbon CVI process modeling and optimization |
| Ahmad Sadr | BS ChE 1997 | Distributed computing techniques |
| Anthony White | BS ChE 1994 | Polysilicon CVD reaction kinetics (co-advised with Prof. Zafiriou) |
| Sheela Baheti | REU 1994 | Emissivity-compensated RTP temperature control |
